I have a concern regarding the installation of our organization's new facility. We are in the process of installing main gas distribution lines for our process tool set. Two of the gasses are BCL3 and Cl. They will be traveling over 100 feet to their destination thru 1/4" coaxial gas lines. Will the gas be able to go this distance under a low pressure?
The reason for my concern is that currently the gas cylinders are located close to their respective process tools. We keep the secondary regulator pressure low to keep the gas from becoming liquid due to particular gasses vapor pressure. I do not know what the pressure drop will be over the distance it will travel under vacuum? Should we use 3/8" coaxial gas line or heat the lines?
Thanks for you assistance on this important matter. I look forward to your response.